Air Filtration for the Microelectronics Industry

Air Filtration Reduces Airborne Molecular Contamination Risk for Microelectronics Production

Fine particulate and airborne molecular contamination (AMC) control is crucial for high-yield, low-reject semiconductor, microelectronics, and digital technology manufacturing industries. Dust and other microparticles can lead to damaged and rejected inventory, contaminate processes, and short-circuit the microprocessors, chips, and wafers.

Sources of AMC in a producing facility include: 

• Chemical off gassing
• Exhaust fumes from vehicles and processes
• Seasonal factors
• Solvent leaks or spills
• Organic contamination, such as moisture and dust

Failures due to AMC are classified as:

• Mechanical effects - obstruction of cooling airflow, interference of moving or optical parts, and deforming of surfaces.
• Chemical effects - corrosion of electrical components, due to dust comprised of sulfur- and chlorine-bearing salts.
• Electrical effects - impedance changes and electronic circuit conductor bridging.

Creating a pristine cleanroom environment helps to mitigate those failures. A dual-filtration system that employs high-quality prefilters and high-efficiency particulate air (HEPA) filters dis recommended for these facilities. Prefilters and secondary filters help eliminate fine airborne particulates, and gas-phase filtration can be added to manage noxious odors that are given off by chemicals.

Cleanroom Filtration Standards

AAF Flanders engineers are active in standards committees in the USA and Europe. We play an important role in establishing new standards and recommending practices for cleanroom applications. As an example, our engineers were key contributors in developing and writing recommended practices for the Institute of Environmental Sciences and Technology (IEST). This professional competence is reflected in the design, manufacture, and testing of each cleanroom filtration solution we produce. The result is cleanroom systems engineered and assembled to give you the particulate removal you require, while delivering energy efficiencies and savings to your bottom line.

Fan filter units such as, AstroFan™ EC Fan Filter Units are ideal for use in various applications requiring controlled clean air, particularly cleanrooms supporting- microelectronic fabrication, semiconductor manufacturing, medical device manufacturing and assembly, and all other controlled and regulated applications. 

Optimize Your Filtration and Improve Your Environment

A thorough air filter audit of your HVAC Systems is the first step that AAF Flanders takes, in order to provide you professional guidance and analysis for cost savings and liability reduction. By conducting this audit, we strive to understand your current state and your complete air filtration needs, applications, and goals for total air quality. This customized air filtration survey costs you nothing and could give you significant benefits by helping you save money, reduce risk, and save time.

AAF Flanders offers VisionAir™ Clean software to help you design your cleanroom and select air filtration configurations that maintain cleanliness levels and optimize energy use. You can even configure multiple rooms and establish the ideal air change rates for your spaces.

Contact your AAF Flanders representative to learn more about how VisionAir™ Clean can minimize risk and optimize operational efficiency.